Elektronisk udstyr og materialer
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Rapid Thermal Processing
Udgivet af Elsevier Science & Technology
ISBN
9780080436128
Om denne bog
Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.
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Bogdetaljer
Forlag
Elsevier Science & Technology
Kategori
Elektronisk udstyr og materialer
ISBN-13
9780080436128
EAN
9780080436128
Format
Indbundet
Sprog
Engelsk
sider
356
Produktbeskrivelse
Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.
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