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Plasmafysik

Physics of Radiofrequency Capacitive Discharge

Udgivet af Taylor & Francis Ltd

Bogdetaljer

  • Hæftet
  • 322 sider
  • Engelsk
ISBN 9780367571627
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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The…

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Bogdetaljer
Forfatter V. P. Savinov
Forlag Taylor & Francis Ltd
Kategori Plasmafysik
ISBN-13 9780367571627
EAN 9780367571627
Format Hæftet
Sprog Engelsk
sider 322
Produktbeskrivelse
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

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