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Optical Materials
Microstructuring Surfaces with Off-Electrode Plasma
Udgivet af Taylor & Francis Ltd
ISBN
9780367886264
Om denne bog
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties…
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Bogdetaljer
Forfatter
Vsevolod A. Kolpakov, Nikolay L. Kazanskiy
Forlag
Taylor & Francis Ltd
Kategori
Plasmafysik
ISBN-13
9780367886264
EAN
9780367886264
Format
Hæftet
Sprog
Engelsk
sider
211
Undertitel
- Microstructuring Surfaces with Off-Electrode Plasma
Produktbeskrivelse
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
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